GENERATION OF SURFACE GRATINGS WITH PERIODS LESS-THAN-1000 A

被引：17

作者：

JOHNSON, LF

INGERSOLL, KA

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 07期

关键词：

D O I：

10.1063/1.92441

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：532 / 534

页数：3

共 7 条

[1] VACUUM ULTRAVIOLET HOLOGRAPHY [J].

BJORKLUND, GC ;

HARRIS, SE ;

YOUNG, JF .

APPLIED PHYSICS LETTERS, 1974, 25 (08) :451-452

[2] SPATIAL PERIOD DIVISION - A NEW TECHNIQUE FOR EXPOSING SUB-MICROMETER-LINEWIDTH PERIODIC AND QUASI-PERIODIC PATTERNS [J].

FLANDERS, DC ;

HAWRYLUK, AM ;

SMITH, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1949-1952

[3] CONTROL OF RELATIVE ETCH RATES OF SIO2 AND SI IN PLASMA ETCHING [J].

HEINECKE, RAH .

SOLID-STATE ELECTRONICS, 1975, 18 (12) :1146-1147

[4] OBLIQUE SHADOW DEPOSITION TECHNIQUE FOR ALTERING THE PROFILE OF GRATING RELIEF PATTERNS ON SURFACES [J].

JOHNSON, LF ;

INGERSOLL, KA ;

KAMMLOTT, GW .

APPLIED PHYSICS LETTERS, 1979, 34 (09) :578-579

[5]

NG WW, 1978, IEEE T ELECTRON DEV, V25, P1193

[6] POSSIBLE APPLICATIONS OF SURFACE-CORRUGATED QUANTUM THIN-FILMS TO NEGATIVE-RESISTANCE DEVICES [J].

SAKAKI, H ;

WAGATSUMA, K ;

HAMASAKI, J ;

SAITO, S .

THIN SOLID FILMS, 1976, 36 (02) :497-501

[7] OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES [J].

SHANK, CV ;

SCHMIDT, RV .

APPLIED PHYSICS LETTERS, 1973, 23 (03) :154-155

← 1 →