PIEZORESISTIVE PROPERTIES OF POLYCRYSTALLINE AND CRYSTALLINE SILICON FILMS

被引：45

作者：

SCHUBERT, D

JENSCHKE, W

UHLIG, T

SCHMIDT, FM

机构：

[1] VEB ZFTM,MEVB,DDR-8080 DRESDEN,GER DEM REP

[2] TECH UNIV DRESDEN,SEKT INFORMAT TECH,DDR-8027 DRESDEN,GER DEM REP

来源：

SENSORS AND ACTUATORS | 1987年 / 11卷 / 02期

关键词：

D O I：

10.1016/0250-6874(87)80013-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：145 / 155

页数：11

共 15 条

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[3]

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[5]

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[6] A GRAPHICAL REPRESENTATION OF THE PIEZORESISTANCE COEFFICIENTS IN SILICON [J].

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[7]

KLABES R, 1984, THIN SOLID FILMS, V113, P327

[8]

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[9] MODELING AND OPTIMIZATION OF MONOLITHIC POLYCRYSTALLINE SILICON RESISTORS [J].

LU, NCC ;

GERZBERG, L ;

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MEINDL, JD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (07) :818-830

[10]

OBERMEIER E, 1982, FACHTAGUNG BAD NAUHE, P49

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