EFFECTS OF INITIAL TRANSIENT STATES IN THE PLASMA DURING THE PREPARATION OF A-SI-H/A-SI3N4-H MULTILAYER STRUCTURES

被引：4

作者：

NAKAYAMA, Y

TAKAHASHI, T

KAWAMURA, T

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1989年 / 60卷 / 01期

关键词：

D O I：

10.1080/13642818908228810

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：11 / 21

页数：11

共 10 条

[1] STRUCTURE OF INTERFACES IN A-SI-H/A-SINX-H SUPERLATTICES
ABELES, B
PERSANS, PD
STASIEWSKI, HS
YANG, L
LANFORD, W
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 1065 - 1068
[2] PHOTOTHERMAL MODULATION SPECTROSCOPY OF MULTILAYERED STRUCTURES OF AMORPHOUS-SILICON AND AMORPHOUS-SILICON CARBIDE
HATTORI, K
MORI, T
OKAMOTO, H
HAMAKAWA, Y
[J]. PHYSICAL REVIEW LETTERS, 1988, 60 (09) : 825 - 827
[3] LUMINESCENCE AND TRANSPORT IN A-SI-H-A-SI1-XNX-H QUANTUM WELL STRUCTURES
HIROSE, M
MIYAZAKI, S
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 327 - 338
[4] JIANG YL, 1988, 20TH 1988 INT C SOL, P239
[5] MALEY N, 1985, PHYS REV B, V31, P5578
[6] GLOW-DISCHARGE DEPOSITION OF A-SI-H FROM PURE SI2H6 AND PURE SIH4
MATSUDA, A
KAGA, T
TANAKA, H
MALHOTRA, L
TANAKA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (02): : L115 - L117
[7] RESONANT TUNNELING THROUGH AMORPHOUS-SILICON SILICON-NITRIDE DOUBLE-BARRIER STRUCTURES
MIYAZAKI, S
IHARA, Y
HIROSE, M
[J]. PHYSICAL REVIEW LETTERS, 1987, 59 (01) : 125 - 127
[8] INITIAL TRANSIENT PHENOMENA IN THE PLASMA DECOMPOSITION OF SILANE
NAKAYAMA, Y
OHTSUCHI, T
NAKANO, M
KAWAMURA, T
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 757 - 760
[9] HIGH-RATE DEPOSITION OF A-SI - H FILM USING THE DECOMPOSITION OF MONO-SILANE
NAKAYAMA, Y
NATSUHARA, T
NAGASAWA, N
KAWAMURA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (10): : L604 - L606
[10] A STUDY OF INITIAL TRANSIENT PHENOMENA IN THE CHEMICAL VAPOR-DEPOSITION PROCESS USING SILANE PLASMA
NAKAYAMA, Y
OHTSUCHI, T
KAWAMURA, T
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) : 1022 - 1028

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