HETEROEPITAXIAL DEPOSITION OF SINGLE-CRYSTAL DIAMOND PARTICLES ON SHARPENED SI TIPS

被引:11
作者
STEPANOVA, AN [1 ]
AKSENOVA, LL [1 ]
KUZNETSOV, AV [1 ]
RAKOVA, EV [1 ]
GIVARGIZOV, EI [1 ]
机构
[1] RUSSIAN ACAD SCI,INST CRYSTALLOG,MOSCOW 117333,RUSSIA
关键词
D O I
10.1016/0167-577X(94)00260-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Heteroepitaxial single-crystal diamond particles were formed on sharpened Si tips in a hot-filament CVD process at increased content of atomic hydrogen in the vapor phase.
引用
收藏
页码:285 / 288
页数:4
相关论文
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