RANGE AND DAMAGE PROFILING AFTER HEAVY-ION IMPLANTATION IN MEV REGION

被引：18

作者：

KAPPERT, HF

HEIDEMANN, KF

GRABE, B

TEKAAT, E

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 47卷 / 02期

关键词：

D O I：

10.1002/pssa.2210470250

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：751 / 762

页数：12

共 30 条

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