BETA-COGA AND EPSILON-NIIN FILMS FROM ORGANOMETALLIC SINGLE-SOURCE PRECURSORS - LIGAND-CONTROL OF THE FILM COMPOSITION

被引：33

作者：

FISCHER, R

SCHERER, W

KLEINE, M

机构：

[1] Anorganisch-chemisches Institut, Technischen Universität München, Garching, D‐W‐8046

来源：

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH | 1993年 / 32卷 / 05期

关键词：

D O I：

10.1002/anie.199307481

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The chemical vapor deposition of binary materials from single-source precursors is particularly advantageous when all the factors essential for the layering- process are incorporated in the molecular structure of the precursor, and thus only pressure and temperature remain as regulating parameters. This concept is demonstrated with heterodinuclear complexes such as 1, whose mild pyrolysis results in intermetallic films, which are of interest for microelectronic purposes.

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页码：748 / 750

页数：3

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