PH-ISFET WITH NMOS TECHNOLOGY

被引:25
作者
ALEGRET, S
BARTROLI, J
JIMENEZ, C
DELVALLE, M
DOMINGUEZ, C
CABRUJA, E
MERLOS, A
机构
[1] UNIV AUTONOMA BARCELONA,DEPT QUIM,E-08193 BARCELONA,SPAIN
[2] UNIV AUTONOMA BARCELONA,CSIC,CTR NACL MICROELECTR,E-08193 BARCELONA,SPAIN
关键词
D O I
10.1002/elan.1140030418
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The construction of a pH-ISFET (ion-selective field effect transistor) fabricated with standard negative-channel MOS technology, compatible with complementary MOS technology, and using silicon nitride as a pH-sensitive material, is described. Its main analytical characteristics are discussed. The resulting calibration plot is linear over the pH range from 2 to 11, with a slope of 54 mV per pH unit.
引用
收藏
页码:355 / 360
页数:6
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