CYLINDRICAL MIRROR ANALYZER (CMA) WITH AN AXIALLY INTEGRATED ISS-AES GUN FOR SURFACE-COMPOSITION ANALYSIS

被引：1

作者：

KATAYAMA, I ^{[1
]}

SHOJI, F ^{[1
]}

OURA, K ^{[1
]}

HANAWA, T ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,ELECTRON BEAM LAB,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 11期

关键词：

D O I：

10.1143/JJAP.27.2164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2164 / 2167

页数：4

共 19 条

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[8] A COMPACT CMA SPECTROMETER WITH AXIALLY INTEGRATED HYBRID ELECTRON-ION GUN FOR ISS, AES AND SPUTTER DEPTH PROFILE ANALYSIS [J].

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BAS, EB .

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