CYLINDRICAL MIRROR ANALYZER (CMA) WITH AN AXIALLY INTEGRATED ISS-AES GUN FOR SURFACE-COMPOSITION ANALYSIS

被引：1

作者：

KATAYAMA, I ^{[1
]}

SHOJI, F ^{[1
]}

OURA, K ^{[1
]}

HANAWA, T ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,ELECTRON BEAM LAB,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 11期

关键词：

D O I：

10.1143/JJAP.27.2164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2164 / 2167

页数：4

共 19 条

[11] ATOM-PROBE FIELD ION MICROSCOPE [J].

MULLER, EW ;

PANITZ, JA ;

MCLANE, SB .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (01) :83-&

[12]

NIEHUS H, 1975, REV SCI INSTRUM, V46, P1275, DOI 10.1063/1.1134417

[13]

OKUTANI T, 1980, SURF SCI, V99, pL410, DOI 10.1016/0039-6028(80)90545-2

[14]

REN D, 1987, SURF SCI, V184, pL439, DOI 10.1016/S0039-6028(87)80357-6

[15] SURFACE SEGREGATION OF NI-CU BINARY-ALLOYS STUDIED BY AN ATOM-PROBE [J].

SAKURAI, T ;

HASHIZUME, T ;

KOBAYASHI, A ;

SAKAI, A ;

HYODO, S ;

KUK, Y ;

PICKERING, HW .

PHYSICAL REVIEW B, 1986, 34 (12) :8379-8390

[16] SEQUENTIAL ISS-AES MEASUREMENT WITH SCANNING AUGER MICROPROBE [J].

SHIMIZU, R ;

KUROKAWA, A .

SURFACE SCIENCE, 1986, 176 (03) :653-656

[17] SCATTERING OF LOW-ENERGY NOBLE GAS IONS FROM METAL SURFACES [J].

SMITH, DP .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (01) :340-+

[18] CALCULATION OF CHEMISORPTION AND ABSORPTION INDUCED SURFACE SEGREGATION [J].

TOMANEK, D ;

MUKHERJEE, S ;

KUMAR, V ;

BENNEMANN, KH .

SURFACE SCIENCE, 1982, 114 (01) :11-22

[19] NEUTRALIZATION EFFECTS IN LOW-ENERGY ION-SCATTERING [J].

WOODRUFF, DP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :639-647

← 1 2 →