INVESTIGATION OF SOI MATERIAL FORMED BY HIGH-DOSE OXYGEN AND NITROGEN IMPLANTATION

被引：11

作者：

SCHORK, R

RYSSEL, H

DEHM, C

机构：

[1] FRAUNHOFER ARBEITSGRP INTEGRIERTE SCHALTUNGEN,D-8520 ERLANGEN,FED REP GER

[2] UNIV ERLANGEN NURNBERG,LEHRSTUHL ELEKTR BAUELEMENTE,D-8520 ERLANGEN,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90775-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：220 / 224

页数：5

共 10 条

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[8]

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[9] NEW CONDITIONS FOR SYNTHESIZING SOI STRUCTURES BY HIGH-DOSE OXYGEN IMPLANTATION [J].

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