CHARACTERIZATION OF ALLOYED AU/CR/AU/GE OHMIC CONTACTS ON GAAS USING ELECTRICAL MEASUREMENTS, TRANSMISSION ELECTRON-MICROSCOPY AND AUGER-ELECTRON SPECTROSCOPY

被引:6
作者
WILLER, J
OPPOLZER, H
机构
关键词
D O I
10.1016/0040-6090(87)90278-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:117 / 130
页数:14
相关论文
共 15 条
[1]   LOW-TEMPERATURE SINTERED AUGE/GAAS OHMIC CONTACT [J].
AINA, O ;
KATZ, W ;
BALIGA, BJ ;
ROSE, K .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) :777-780
[2]   MODELS FOR CONTACTS TO PLANAR DEVICES [J].
BERGER, HH .
SOLID-STATE ELECTRONICS, 1972, 15 (02) :145-&
[3]   ALLOYED OHMIC CONTACTS TO GAAS [J].
BRASLAU, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :803-807
[4]   INTERFACE CHEMICAL-REACTION AND DIFFUSION OF THIN METAL-FILMS ON SEMICONDUCTORS [J].
BRILLSON, LJ .
THIN SOLID FILMS, 1982, 89 (04) :461-469
[5]  
BRILLSON LJ, 1983, DEC P INT EL DEV M W, P111
[6]  
DAVIS LE, 1978, HDB AUGER ELECTRON S
[7]   ANALYSIS OF GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS - CHROMIUM IN GOLD [J].
HOLLOWAY, PH ;
AMOS, DE ;
NELSON, GC .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3769-3775
[8]   AUGER STUDIES ON RAPID GRAIN-BOUNDARY DIFFUSION OF GE THROUGH AU [J].
INGREY, S ;
MACLAURIN, B .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :358-361
[9]  
Kellner W., 1975, Siemens Forschungs- und Entwicklungsberichte, V4, P137
[10]   ELECTRON-MICROSCOPE STUDIES OF AN ALLOYED AU/NI-AU-GE OHMIC CONTACT TO GAAS [J].
KUAN, TS ;
BATSON, PE ;
JACKSON, TN ;
RUPPRECHT, H ;
WILKIE, EL .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :6952-6957