SCANNING TUNNELING MICROSCOPY AS A TOOL TO STUDY SURFACE-ROUGHNESS OF SPUTTERED THIN-FILMS

被引：21

作者：

SCHONENBERGER, C ^{[1
]}

ALVARADO, SF ^{[1
]}

ORTIZ, C ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,DIV RES,SAN JOSE,CA 95120

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 09期

关键词：

D O I：

10.1063/1.343967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4258 / 4261

页数：4

共 13 条

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[2]

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[7] SCANNING TUNNELING MICROSCOPY [J].

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[8]

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[9]

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[10] SCANNING TUNNELING MICROSCOPE TIP STRUCTURES [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :445-447

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