PREPARATION OF PB(ZN0.52TI0.48)O3 FILMS BY LASER ABLATION

被引：66

作者：

OTSUBO, S ^{[1
]}

MAEDA, T ^{[1
]}

MINAMIKAWA, T ^{[1
]}

YONEZAWA, Y ^{[1
]}

MORIMOTO, A ^{[1
]}

SHIMIZU, T ^{[1
]}

机构：

[1] IND RES INST ISHIKAWA PREFECTURE,KANAZAWA 92002,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 01期

关键词：

EPMA; Laser ablation; No deviation of composition; Pb(Zr[!sub]1-x[!/sub]Ti[!sub]x[!/sub])O[!sub]3[!/sub]thin film; Perovskite; Pyrochlore; SEM; XRD;

D O I：

10.1143/JJAP.29.L133

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pb(Zr0.52Ti0.48)O3films were prepared on an r-plane sapphire substrate by laser ablation using the ArF excimer laser. This is the first report on the preparation of Pb(Zr0.52Ti0.48)O3films by laser ablation. The composition of the deposited films was found to be fairly close to the composition of the target material for a wide range of the substrate temperature, 400–750°C. The substrate temperature greatly influences the crystal structure; a low substrate temperature produces a pyrochlore phase and a high substrate temperature (750°C) a perovskite phase. © 1990 IOP Publishing Ltd.

引用

页码：L133 / L136

页数：4

共 16 条

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