RELATIONSHIP AMONG REFLECTANCE-DIFFERENCE SPECTROSCOPY, SURFACE PHOTOABSORPTION, AND SPECTROELLIPSOMETRY

被引：65

作者：

HINGERL, K ^{[1
]}

ASPNES, DE ^{[1
]}

KAMIYA, I ^{[1
]}

FLOREZ, LT ^{[1
]}

机构：

[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.109890

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

From the reflectance expressions for a thin biaxial layer on an isotropic substrate we relate reflectance-difference spectroscopy (RDS), surface photoabsorption (SPA), and spectroellipsometry. Using these results and our recently acquired RD database, we determine surface reconstructions present during flow-modulated organometallic chemical vapor growth of epitaxial GaAs from SPA data that were published by others.

引用

页码：885 / 887

页数：3

共 23 条

[1] APPLICATION OF ELLIPSOMETRY TO CRYSTAL-GROWTH BY ORGANOMETALLIC MOLECULAR-BEAM EPITAXY [J].

ASPNES, DE ;

QUINN, WE ;

GREGORY, S .

APPLIED PHYSICS LETTERS, 1990, 56 (25) :2569-2571

[2] OPTICAL-REFLECTANCE AND ELECTRON-DIFFRACTION STUDIES OF MOLECULAR-BEAM-EPITAXY GROWTH TRANSIENTS ON GAAS(001) [J].

ASPNES, DE ;

HARBISON, JP ;

STUDNA, AA ;

FLOREZ, LT .

PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1687-1690

[3] OPTICAL CONTROL OF GROWTH OF ALXGA1-XAS BY ORGANOMETALLIC MOLECULAR-BEAM EPITAXY [J].

ASPNES, DE ;

QUINN, WE ;

GREGORY, S .

APPLIED PHYSICS LETTERS, 1990, 57 (25) :2707-2709

[4] APPROXIMATE SOLUTION OF ELLIPSOMETRIC EQUATIONS FOR OPTICALLY BIAXIAL CRYSTALS [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1980, 70 (10) :1275-1277

[5] ABOVE-BANDGAP OPTICAL ANISOTROPIES IN CUBIC SEMICONDUCTORS - A VISIBLE NEAR ULTRAVIOLET PROBE OF SURFACES [J].

ASPNES, DE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05) :1498-1506

[6]

AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, pCH4

[7] PERTURBATIVE APPROACH TO THE CALCULATION OF THE ELECTRIC-FIELD NEAR A METAL-SURFACE [J].

BAGCHI, A ;

BARRERA, RG ;

RAJAGOPAL, AK .

PHYSICAL REVIEW B, 1979, 20 (12) :4824-4838

[8] OPTICS IN STRATIFIED AND ANISOTROPIC MEDIA - 4X4-MATRIX FORMULATION [J].

BERREMAN, DW .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (04) :502-&

[9] APPLICATION OF REFLECTANCE DIFFERENCE SPECTROSCOPY (RDS) TO MIGRATION-ENHANCED EPITAXY (MEE) GROWTH OF GAAS [J].

BRIONES, F ;

HORIKOSHI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1990, 29 (06) :1014-1021

[10] MICROSCOPIC THEORY OF OPTICAL-PROPERTIES OF CRYSTAL-SURFACES [J].

DELSOLE, R .

SOLID STATE COMMUNICATIONS, 1981, 37 (07) :537-540

← 1 2 3 →