ISOTOPIC FRACTIONATION IN THE SPUTTERING OF MO-92-MO-1OO TARGETS - COMMENT

被引：18

作者：

ECKSTEIN, W

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 83卷 / 03期

关键词：

D O I：

10.1016/0168-583X(93)95851-U

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This paper describes results of computer simulations of sputtering a molybdenum target composed of isotopes with mass 92 and 100 to equal parts. The computed data are compared to recently measured values and are found generally in reasonable agreement. Especially the dependence of the fractionation on the exit angle of sputtered atoms is larger than expected from the analytic theory.

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页码：329 / 333

页数：5

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