PREPARATION OF X-RAY LITHOGRAPHY MASKS WITH LARGE AREA SANDWICH STRUCTURE MEMBRANE

被引：14

作者：

SUZUKI, K ^{[1
]}

MATSUI, J ^{[1
]}

KADOTA, T ^{[1
]}

ONO, T ^{[1
]}

机构：

[1] NIPPON TELEG & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN

来源：

关键词：

D O I：

10.1143/JJAP.17.1447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1447 / 1448

页数：2

共 7 条

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[2] FLANDERS DC, 1977, 14TH S EL ION PHOT B
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1324 - 1324
[4] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY
MAYDAN, D
COQUIN, GA
MALDONADO, JR
SOMEKH, S
LOU, DY
TAYLOR, GN
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 429 - 433
[5] MIMURA Y, 1976, 1976 P NAT CONV I EL, V2, P2
[6] MURASE K, 1977, P INT C MICROLITHOGR, P261
[7] X-RAY LITHOGRAPHY - COMPLEMENTARY TECHNIQUE TO ELECTRON-BEAM LITHOGRAPHY
SMITH, HI
SPEARS, DL
BERNACKI, SE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 913 - 917