USE OF SCANNING AUGER MICROSCOPY IN MOLECULAR-BEAM EPITAXY OF GAAS AND GAP

被引：11

作者：

ARTHUR, JR ^{[1
]}

机构：

[1] BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1317923

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：136 / 139

页数：4

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