共 17 条
[3]
GREENE R, UNPUB
[4]
APPLICATION OF THE SELF-ALIGNED TITANIUM SILICIDE PROCESS TO VERY LARGE-SCALE INTEGRATED N-METAL-OXIDE-SEMICONDUCTOR AND COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (06)
:1657-1663
[7]
KITTEL C, 1976, INTRO SOLID STATE PH, pCH6
[8]
SELF-ALIGNED TITANIUM SILICIDE DEVICE TECHNOLOGY BY NH3 PLASMA ASSISTED THERMAL ANNEALING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (06)
:1667-1673
[9]
ELECTRONIC TRANSPORT-PROPERTIES OF TISI2 THIN-FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1984, 2 (01)
:10-16
[10]
MOY D, 1987, VLSI SCI TECHNOLOGY, P381