STRUCTURAL CHARACTERIZATION OF EPITAXIAL BATIO3 THIN-FILMS GROWN BY SPUTTER-DEPOSITION ON MGO(100)

被引:57
作者
KIM, S
HISHITA, S
KANG, YM
BAIK, S
机构
[1] NIRIM,TSUKUBA,IBARAKI 305,JAPAN
[2] POHANG UNIV SCI & TECHNOL,DEPT MAT SCI & ENGN,POHANG 790784,SOUTH KOREA
关键词
D O I
10.1063/1.360696
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial thin films of BaTiO3 have been prepared using radio-frequency magnetron sputter deposition on MgO(100) substrates. Various x-ray-diffraction techniques were employed to characterize the crystal structure of the films. The films were fully tetragonal and consisted of c domains. Their tetragonality has been shown to be 1.013, which is almost the same as the bulk value of BaTiO3. However, the cross-sectional transmission electron microscopic micrograph showed that a very small amount of a domains coexists forming 90 degrees domain boundaries in the matrix of c domains. In spite of the negligible strain caused by the phase transformation, it seems to be inevitable to form a certain small amount of a domains in the BaTiO3 film on MgO system. (C) 1995 American Institute of Physics.
引用
收藏
页码:5604 / 5608
页数:5
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