STRUCTURE AND PROPERTIES OF SPUTTERED CARBON OVERCOATS ON RIGID MAGNETIC MEDIA DISKS

被引：53

作者：

TSAI, HC

BOGY, DB

KUNDMANN, MK

VEIRS, DK

HILTON, MR

MAYER, ST

机构：

[1] UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, CA 94720 USA

[2] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB, DIV MAT & CHEM SCI, BERKELEY, CA 94720 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.575581

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2307 / 2315

页数：9

共 52 条

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