LOW-TEMPERATURE EPITAXIAL-GROWTH OF THIN METAL-FILMS

被引:224
作者
EVANS, JW
SANDERS, DE
THIEL, PA
DEPRISTO, AE
机构
[1] IOWA STATE UNIV SCI & TECHNOL,DEPT CHEM,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,AMES LAB,AMES,IA 50011
来源
PHYSICAL REVIEW B | 1990年 / 41卷 / 08期
关键词
D O I
10.1103/PhysRevB.41.5410
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a different mechanism to explain the occurrence of long-lived oscillations in diffraction spot intensities during epitaxial growth of metal films on fcc (100) substrates at low temperature. Rather than rely on the common picture of cyclical nucleation and growth to produce the oscillations, the model invokes downward funneling deposition dynamics to fourfold-hollow adsorption sites. © 1990 The American Physical Society.
引用
收藏
页码:5410 / 5413
页数:4
相关论文
共 16 条
[1]   GROWTH-MECHANISM FOR MOLECULAR-BEAM EPITAXY OF GROUP-IV SEMICONDUCTORS [J].
CLARKE, S ;
VVEDENSKY, DD .
PHYSICAL REVIEW B, 1988, 37 (11) :6559-6562
[2]   MOLECULAR-DYNAMICS SIMULATIONS OF ENERGY-FLOW AT A SOLID-SURFACE - NEW METHODS USING A SMALL NUMBER OF ATOMS [J].
DEPRISTO, AE ;
METIU, H .
JOURNAL OF CHEMICAL PHYSICS, 1989, 90 (02) :1229-1236
[3]   REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION (RHEED) OSCILLATIONS AT 77-K [J].
EGELHOFF, WF ;
JACOB, I .
PHYSICAL REVIEW LETTERS, 1989, 62 (08) :921-924
[4]  
Evans J.D., UNPUB
[5]   RANDOM-DEPOSITION MODELS FOR THIN-FILM EPITAXIAL-GROWTH [J].
EVANS, JW .
PHYSICAL REVIEW B, 1989, 39 (09) :5655-5664
[6]   SCALING OF ROUGH SURFACES - EFFECTS OF SURFACE-DIFFUSION [J].
FAMILY, F .
JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1986, 19 (08) :L441-L446
[7]   TEMPERATURE-DEPENDENCE OF METAL-FILM GROWTH VIA LOW-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATIONS - PT/PD(100) [J].
FLYNN, DK ;
EVANS, JW ;
THIEL, PA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2162-2166
[8]   INTENSITY OSCILLATIONS IN REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION DURING MOLECULAR-BEAM EPITAXY OF NI ON W(110) [J].
KOZIOL, C ;
LILIENKAMP, G ;
BAUER, E .
APPLIED PHYSICS LETTERS, 1987, 51 (12) :901-903
[9]   CORRECTED EFFECTIVE MEDIUM METHOD .3. APPLICATION TO CLUSTERS OF MG AND CU [J].
KRESS, JD ;
STAVE, MS ;
DEPRISTO, AE .
JOURNAL OF PHYSICAL CHEMISTRY, 1989, 93 (04) :1556-1565
[10]  
LARSON PK, 1988, REFLECTION HIGH ENER