CRYSTALLOGRAPHIC CHARACTERISTICS AND ELECTRICAL-PROPERTIES OF AL-DOPED ZNO THIN-FILMS PREPARED BY IONIZED DEPOSITION

被引：46

作者：

KUROYANAGI, A

机构：

来源：

关键词：

D O I：

10.1063/1.343700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5492 / 5497

页数：6

共 17 条

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[7] KUROYANAGI A, 1988, T IEE JPN C, V109, P891
[8] REACTIVE SYNTHESIS OF WELL-ORIENTED ZINC-OXIDE FILMS BY MEANS OF THE FACING TARGETS SPUTTERING METHOD
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[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (06) : 2098 - 2103
[9] OPTICAL-PROPERTIES OF ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
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