REACTIVE SYNTHESIS OF WELL-ORIENTED ZINC-OXIDE FILMS BY MEANS OF THE FACING TARGETS SPUTTERING METHOD

被引：28

作者：

MATSUOKA, M

HOSHI, Y

NAOE, M

机构：

[1] TOKYO INST POLYTECH, FAC ENGN, ATSUGI, KANAGAWA 24302, JAPAN

[2] TOKYO INST TECHNOL, FAC ENGN, MEGURO KU, TOKYO 152, JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 06期

关键词：

D O I：

10.1063/1.341116

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2098 / 2103

页数：6

共 9 条

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[8] OPTICAL-PROPERTIES OF SINGLE-CRYSTALLINE ZNO FILM SMOOTHLY CHEMICAL-VAPOR DEPOSITED ON INTERMEDIATELY SPUTTERED THIN ZNO FILM ON SAPPHIRE [J].

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[9] CHARACTERIZATION OF ZNO PIEZOELECTRIC FILMS PREPARED BY RF PLANAR-MAGNETRON SPUTTERING [J].

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