THE RELATIONSHIP BETWEEN RESIDUAL-STRESS, X-RAY ELASTIC-CONSTANTS AND LATTICE-PARAMETERS IN TIN FILMS MADE BY PHYSICAL VAPOR-DEPOSITION

被引:58
作者
PERRY, AJ
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D O I
10.1016/0040-6090(89)90622-6
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T [工业技术];
学科分类号
08 ;
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页码:63 / 70
页数:8
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