3-DIMENSIONAL IMAGE REALIZATION IN INTERFERENCE MICROSCOPY

被引：86

作者：

CHIM, SSC

KINO, GS

机构：

[1] Edward L. Ginzton Laboratory, Stanford University, Stanford, CA

来源：

APPLIED OPTICS | 1992年 / 31卷 / 14期

关键词：

D O I：

10.1364/AO.31.002550

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe an efficient algorithm based on the Hilbert transform for reconstructing cross-sectional or three-dimensional images from the input images acquired by an interference microscope. First the design of this filter is presented, and cross-sectional images of an integrated circuit constructed with this algorithm are demonstrated. It is shown that this Hilbert transform algorithm can be easily implemented with a low-cost frame grabber so that the computation time required for image reconstruction is drastically reduced.

引用

页码：2550 / 2553

页数：4