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ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF GEXSI1-X/SI STRUCTURES
被引:19
作者
:
ELLIMAN, RG
论文数:
0
引用数:
0
h-index:
0
机构:
AUSTRALIAN NATL UNIV,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA
ELLIMAN, RG
RIDGWAY, MC
论文数:
0
引用数:
0
h-index:
0
机构:
AUSTRALIAN NATL UNIV,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA
RIDGWAY, MC
WILLIAMS, JS
论文数:
0
引用数:
0
h-index:
0
机构:
AUSTRALIAN NATL UNIV,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA
WILLIAMS, JS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
机构:
AUSTRALIAN NATL UNIV,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA
BEAN, JC
机构
:
[1]
AUSTRALIAN NATL UNIV,DEPT ELECTR MAT ENGN,CANBERRA,ACT 2600,AUSTRALIA
[2]
AT&T BELL LABS,MURRAY HILL,NJ 07974
来源
:
APPLIED PHYSICS LETTERS
|
1989年
/ 55卷
/ 09期
关键词
:
D O I
:
10.1063/1.102264
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:843 / 845
页数:3
相关论文
共 7 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
ION-BEAM-INDUCED CRYSTALLIZATION AND AMORPHIZATION OF SILICON
ELLIMAN, RG
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
ELLIMAN, RG
WILLIAMS, JS
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
WILLIAMS, JS
BROWN, WL
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
BROWN, WL
LEIBERICH, A
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
LEIBERICH, A
MAHER, DM
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
MAHER, DM
KNOELL, RV
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
KNOELL, RV
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
1987,
19-20
: 435
-
442
[3]
ELLIMAN RG, 1986, NUCL INSTRUM METH B, V15, P439, DOI 10.1016/0168-583X(86)90340-X
[4]
COMMENSURATE AND INCOMMENSURATE STRUCTURES IN MOLECULAR-BEAM EPITAXIALLY GROWN GEXSI1-X FILMS ON SI(100)
FIORY, AT
论文数:
0
引用数:
0
h-index:
0
FIORY, AT
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
FELDMAN, LC
论文数:
0
引用数:
0
h-index:
0
FELDMAN, LC
ROBINSON, IK
论文数:
0
引用数:
0
h-index:
0
ROBINSON, IK
[J].
JOURNAL OF APPLIED PHYSICS,
1984,
56
(04)
: 1227
-
1229
[5]
ION-BEAM-INDUCED EPITAXIAL REGROWTH OF AMORPHOUS LAYERS IN SILICON ON SAPPHIRE
LINNROS, J
论文数:
0
引用数:
0
h-index:
0
LINNROS, J
SVENSSON, B
论文数:
0
引用数:
0
h-index:
0
SVENSSON, B
HOLMEN, G
论文数:
0
引用数:
0
h-index:
0
HOLMEN, G
[J].
PHYSICAL REVIEW B,
1984,
30
(07):
: 3629
-
3638
[6]
INFLUENCE OF A THIN INTERFACIAL OXIDE LAYER ON THE ION-BEAM ASSISTED EPITAXIAL CRYSTALLIZATION OF DEPOSITED SI
PRIOLO, F
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
PRIOLO, F
LAFERLA, A
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
LAFERLA, A
SPINELLA, C
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
SPINELLA, C
RIMINI, E
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
RIMINI, E
FERLA, G
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
FERLA, G
BAROETTO, F
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
BAROETTO, F
LICCIARDELLO, A
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
LICCIARDELLO, A
[J].
APPLIED PHYSICS LETTERS,
1988,
53
(26)
: 2605
-
2607
[7]
YU AA, UNPUB
←
1
→
共 7 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
ION-BEAM-INDUCED CRYSTALLIZATION AND AMORPHIZATION OF SILICON
ELLIMAN, RG
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
ELLIMAN, RG
WILLIAMS, JS
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
WILLIAMS, JS
BROWN, WL
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
BROWN, WL
LEIBERICH, A
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
LEIBERICH, A
MAHER, DM
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
MAHER, DM
KNOELL, RV
论文数:
0
引用数:
0
h-index:
0
机构:
ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA
KNOELL, RV
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
1987,
19-20
: 435
-
442
[3]
ELLIMAN RG, 1986, NUCL INSTRUM METH B, V15, P439, DOI 10.1016/0168-583X(86)90340-X
[4]
COMMENSURATE AND INCOMMENSURATE STRUCTURES IN MOLECULAR-BEAM EPITAXIALLY GROWN GEXSI1-X FILMS ON SI(100)
FIORY, AT
论文数:
0
引用数:
0
h-index:
0
FIORY, AT
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
FELDMAN, LC
论文数:
0
引用数:
0
h-index:
0
FELDMAN, LC
ROBINSON, IK
论文数:
0
引用数:
0
h-index:
0
ROBINSON, IK
[J].
JOURNAL OF APPLIED PHYSICS,
1984,
56
(04)
: 1227
-
1229
[5]
ION-BEAM-INDUCED EPITAXIAL REGROWTH OF AMORPHOUS LAYERS IN SILICON ON SAPPHIRE
LINNROS, J
论文数:
0
引用数:
0
h-index:
0
LINNROS, J
SVENSSON, B
论文数:
0
引用数:
0
h-index:
0
SVENSSON, B
HOLMEN, G
论文数:
0
引用数:
0
h-index:
0
HOLMEN, G
[J].
PHYSICAL REVIEW B,
1984,
30
(07):
: 3629
-
3638
[6]
INFLUENCE OF A THIN INTERFACIAL OXIDE LAYER ON THE ION-BEAM ASSISTED EPITAXIAL CRYSTALLIZATION OF DEPOSITED SI
PRIOLO, F
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
PRIOLO, F
LAFERLA, A
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
LAFERLA, A
SPINELLA, C
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
SPINELLA, C
RIMINI, E
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
RIMINI, E
FERLA, G
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
FERLA, G
BAROETTO, F
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
BAROETTO, F
LICCIARDELLO, A
论文数:
0
引用数:
0
h-index:
0
机构:
SGS THOMSON, CATANIA, ITALY
LICCIARDELLO, A
[J].
APPLIED PHYSICS LETTERS,
1988,
53
(26)
: 2605
-
2607
[7]
YU AA, UNPUB
←
1
→