TRAVELING WAVE-DRIVEN MICROFABRICATED ELECTROHYDRODYNAMIC PUMPS FOR LIQUIDS

被引：107

作者：

FUHR, G ^{[1
]}

SCHNELLE, T ^{[1
]}

WAGNER, B ^{[1
]}

机构：

[1] FRAUNHOFER INST SILIZIUMTECHNOL,D-14199 BERLIN,GERMANY

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 04期

关键词：

D O I：

10.1088/0960-1317/4/4/007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The basic principles of high-frequency travelling wave-driven micropumps are explained. We describe the design and construction of closed pump systems which contain planar and three dimensional components fabricated by semiconductor technology. Theoretical and experimental results and further perspectives are discussed.

引用

页码：217 / 226

页数：10

共 19 条

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