LOW-RANGE FLOWMETERS FOR USE WITH VACUUM AND LEAK STANDARDS

被引：54

作者：

MCCULLOH, KE

TILFORD, CR

EHRLICH, CD

LONG, FG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期

关键词：

D O I：

10.1116/1.574163

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：376 / 381

页数：6

共 9 条

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EHRLICH, C .

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[2]

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[3] ULTRASONIC MANOMETERS FOR LOW AND MEDIUM VACUA UNDER DEVELOPMENT AT NATIONAL-BUREAU-OF-STANDARDS [J].

HEYDEMANN, PLM ;

TILFORD, CR ;

HYLAND, RW .

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[4]

HOJO H, 1977, 7TH P INT VAC C 3RD, P117

[5] TRANSFER LEAK STUDIES AND COMPARISONS OF PRIMARY LEAK STANDARDS AT THE NATIONAL-BUREAU-OF-STANDARDS AND SANDIA-NATIONAL-LABORATORIES [J].

HYLAND, RW ;

EHRLICH, CD ;

TILFORD, CR ;

THORNBERG, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :334-337

[6]

HYLAND RW, 1986, J VAC SCI TECHNOL A, V3, P1731

[7] CALIBRATION OF MOLECULAR DRAG VACUUM GAUGES [J].

MCCULLOH, KE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :168-171

[8] THE NATIONAL-BUREAU-OF-STANDARDS ORIFICE-FLOW PRIMARY HIGH-VACUUM STANDARD [J].

MCCULLOH, KE ;

TILFORD, CR ;

WOOD, SD ;

MARTIN, DF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :362-362

[9] MEASUREMENT OF GAS THROUGHPUT IN RANGE 10-4 TO 10-10PAM3S-1 [J].

PEGGS, GN .

VACUUM, 1976, 26 (08) :321-328

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