LIGHT-INDUCED ANNEALING OF METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON

被引：44

作者：

GRAEFF, CFO

BUHLEIER, R

STUTZMANN, M

机构：

[1] Max-Planck-Institut fur Festkoerperforschung, 7000 Stuttgart 80

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 23期

关键词：

D O I：

10.1063/1.109170

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Measurements of light-induced creation and annealing of metastable dangling bond defects in undoped hydrogenated amorphous silicon thin films are reported. A decrease of the defect density by 50% induced by continuous illumination is observed after fast defect creation by pulsed light. The kinetics of creation and recovery are discussed, as well as the implications for present models treating metastable defects in hydrogenated amorphous silicon.

引用

页码：3001 / 3003

页数：3

共 13 条

[1] DELAHOY AE, 1987, AIP C P, V157, P263
[2] OPTICAL BLEACHING OF METASTABLE DEFECTS IN AMORPHOUS-SILICON
GANGULY, G
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (07) : 874 - 876
[3] THE CONNECTION BETWEEN DISPERSIVE HYDROGEN MOTION AND THE KINETICS OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
JACKSON, WB
[J]. PHILOSOPHICAL MAGAZINE LETTERS, 1989, 59 (02) : 103 - 108
[4] INFLUENCE OF ILLUMINATION DURING ANNEALING OF QUENCHED DEFECTS IN UNDOPED AMORPHOUS-SILICON
MEAUDRE, R
MEAUDRE, M
[J]. PHYSICAL REVIEW B, 1992, 45 (20): : 12134 - 12136
[5] SATURATION OF THE LIGHT-INDUCED DEFECT DENSITY IN HYDROGENATED AMORPHOUS-SILICON
PARK, HR
LIU, JZ
WAGNER, S
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (25) : 2658 - 2660
[6] REDFIELD D, 1989, APPL PHYS LETT, V52, P493
[7] ROSSI M, UNPUB
[8] INTENSITY AND TEMPERATURE-DEPENDENCE OF THE STEADY-STATE LIGHT-INDUCED DEFECT DENSITY IN A-SI-H
SANTOS, PV
JACKSON, WB
STREET, RA
[J]. PHYSICAL REVIEW B, 1991, 44 (23): : 12800 - 12805
[9] CURRENT-INDUCED DEFECT CREATION AND RECOVERY IN HYDROGENATED AMORPHOUS-SILICON
STREET, RA
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (09) : 1084 - 1086
[10] FAST METASTABLE-DEFECT CREATION IN AMORPHOUS-SILICON BY FEMTOSECOND LIGHT-PULSES
STUTZMANN, M
NUNNENKAMP, J
BRANDT, MS
ASANO, A
[J]. PHYSICAL REVIEW LETTERS, 1991, 67 (17) : 2347 - 2350

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