THOMSON SCATTERING FOR DETERMINING ELECTRON CONCENTRATIONS AND TEMPERATURES IN AN INDUCTIVELY COUPLED PLASMA .1. ASSESSMENT OF THE TECHNIQUE FOR A LOW-FLOW, LOW-POWER PLASMA

被引:22
作者
MARSHALL, KA [1 ]
HIEFTJE, GM [1 ]
机构
[1] INDIANA UNIV,DEPT CHEM,BLOOMINGTON,IN 47401
关键词
D O I
10.1016/0584-8547(88)80117-4
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
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页码:841 / 849
页数:9
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