THOMSON SCATTERING FOR DETERMINING ELECTRON CONCENTRATIONS AND TEMPERATURES IN AN INDUCTIVELY COUPLED PLASMA .1. ASSESSMENT OF THE TECHNIQUE FOR A LOW-FLOW, LOW-POWER PLASMA

被引：22

作者：

MARSHALL, KA ^{[1
]}

HIEFTJE, GM ^{[1
]}

机构：

[1] INDIANA UNIV,DEPT CHEM,BLOOMINGTON,IN 47401

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1988年 / 43卷 / 6-7期

关键词：

D O I：

10.1016/0584-8547(88)80117-4

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：841 / 849

页数：9

共 39 条

[11] SPATIAL PROFILES OF ELECTRON-DENSITY IN THE INDUCTIVELY COUPLED PLASMA [J].

CAUGHLIN, BL ;

BLADES, MW .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (07) :987-993

[12] SPECTRAL CHARACTERISTICS OF AR-N-2, AR-O-2, AR-HE MIXED GAS INDUCTIVELY COUPLED PLASMAS .2. [J].

CHOOT, EH ;

HORLICK, G .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1986, 41 (09) :907-924

[13] VERTICAL SPATIAL EMISSION PROFILES IN AR-N-2 MIXED GAS INDUCTIVELY COUPLED PLASMAS .1. [J].

CHOOT, EH ;

HORLICK, G .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1986, 41 (09) :889-906

[14] ELECTRONIC PARTITION FUNCTIONS OF ATOMS AND IONS BETWEEN 1500 DEGREES K AND 7000 DEGREES K [J].

DEGALAN, L ;

SMITH, R ;

WINEFORDNER, JD .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1968, B 23 (08) :521-+

[15]

DESILVA AW, 1970, METHODS EXPT PHYSI A, V9

[16]

DOUGLAS DJ, 1985, PROG ANAL ATOM SPECT, V8, P1

[17] LASER LIGHT SCATTERING IN LABORATORY PLASMAS [J].

EVANS, DE ;

KATZENSTEIN, J .

REPORTS ON PROGRESS IN PHYSICS, 1969, 32 (02) :207-+

[18]

FASSEL VA, 1974, ANAL CHEM, V46, P1155

[19] DETERMINATION OF ELECTRON-DENSITY IN AN ATOMIC PLASMA BY LEAST-SQUARES FIT TO THE STARK PROFILE [J].

GOODE, SR ;

DEAVOR, JP .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1984, 39 (06) :813-818

[20] TALANTA REVIEW - PLASMA EMISSION SOURCES IN ANALYTICAL SPECTROSCOPY .2. [J].

GREENFIELD, S ;

MCGEACHIN, HM ;

SMITH, PB .

TALANTA, 1975, 22 (07) :553-562

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