SURFACTANT-STABILIZED STRAINED GE CONES ON SI(001)

被引:41
作者
HORNVONHOEGEN, M
ALFALOU, A
MULLER, BH
KOHLER, U
ANDERSOHN, L
DAHLHEIMER, B
HENZLER, M
机构
[1] Institut für Festkörperphysik, Universität Hannover, 30167 Hannover
关键词
D O I
10.1103/PhysRevB.49.2637
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The formation of circular cone-shaped Ge islands (12 degrees cones) has been observed for the growth of eight monolayers of Ge on Si(001) at 700 degrees C using Sb as a surfactant. The Ge cones are strained and grow pseudomorphically, adopting the Si lattice constant. They have a tilt angle of 12 degrees and are composed of [117]-, [105]-type, and all intermediate facets. The island-size distribution is peaked around a typical size of similar to 300-400 Angstrom, which results from a formation process under equilibrium conditions for diffusion of the Ge atoms. Growth at lower temperatures down to 300 degrees C with Sb as a surfactant results in epitaxial but very rough Ge films which show a high degree of disorder.
引用
收藏
页码:2637 / 2650
页数:14
相关论文
共 22 条
  • [1] ALFALOU AA, UNPUB
  • [2] Burghartz J. N., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P297, DOI 10.1109/IEDM.1990.237171
  • [3] STABILITIES OF SINGLE-LAYER AND BILAYER STEPS ON SI(001) SURFACES
    CHADI, DJ
    [J]. PHYSICAL REVIEW LETTERS, 1987, 59 (15) : 1691 - 1694
  • [4] SURFACTANTS IN EPITAXIAL-GROWTH
    COPEL, M
    REUTER, MC
    KAXIRAS, E
    TROMP, RM
    [J]. PHYSICAL REVIEW LETTERS, 1989, 63 (06) : 632 - 635
  • [5] 91 GHZ SIGE HBTS GROWN BY MBE
    GRUHLE, A
    KIBBEL, H
    ERBEN, U
    KASPER, E
    [J]. ELECTRONICS LETTERS, 1993, 29 (04) : 415 - 417
  • [6] LOW-ENERGY ELECTRON-DIFFRACTION INVESTIGATIONS OF SI MOLECULAR-BEAM EPITAXY ONTO SI(100)
    HORN, M
    GOTTER, U
    HENZLER, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (02): : 727 - 730
  • [7] HORNVONHOEGEN M, 1993, SURF SCI, V284, P53, DOI 10.1016/0039-6028(93)90524-N
  • [8] DEFECT SELF-ANNIHILATION IN SURFACTANT-MEDIATED EPITAXIAL-GROWTH
    HORNVONHOEGEN, M
    LEGOUES, FK
    COPEL, M
    REUTER, MC
    TROMP, RM
    [J]. PHYSICAL REVIEW LETTERS, 1991, 67 (09) : 1130 - 1133
  • [9] SURFACTANT-INDUCED REVERSIBLE CHANGES OF SURFACE-MORPHOLOGY
    HORNVONHOEGEN, M
    MULLER, BH
    ALFALOU, A
    HENZLER, M
    [J]. PHYSICAL REVIEW LETTERS, 1993, 71 (19) : 3170 - 3173
  • [10] TRENCH FORMATION IN SURFACTANT MEDIATED EPITAXIAL FILM GROWTH OF GE ON SI(100)
    JUSKO, O
    KOHLER, U
    PIETSCH, GJ
    MULLER, B
    HENZLER, M
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 54 (03): : 265 - 269