GROWTH OF THIN PLATINUM FILMS ON HYDROGENATED AMORPHOUS-SILICON AND ITS OXIDE

被引：9

作者：

GOLDSTEIN, B

SZOSTAK, DJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 03期

关键词：

D O I：

10.1116/1.570548

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：718 / 720

页数：3

相关论文

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