共 22 条
[4]
Carter G., 1976, ION IMPLANTATION SEM
[6]
CHAUDHARI P, 1976, AIP C P, V29, P113
[7]
CHI GC, 1976, AIP C P, V29, P147
[8]
Cronemeyer D., 1974, AIP CONF P, V18, P85
[9]
INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (01)
:79-83
[10]
ESHO S, 1976, AIP C P, V34, P331