MULTILEVEL INTERCONNECTIONS FOR WAFER SCALE INTEGRATION

被引:11
作者
MCDONALD, JF
STECKL, AJ
NEUGEBAUER, CA
CARLSON, RO
BERGENDAHL, AS
机构
[1] GE, SCHENECTADY, NY 12301 USA
[2] IBM CORP, ESSEX JUNCTION, VT 05452 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573641
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3127 / 3138
页数:12
相关论文
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