ELECTRICAL PROFILING AND OPTICAL ACTIVATION STUDIES OF BE-IMPLANTED GAAS

被引:63
作者
MCLEVIGE, WV
HELIX, MJ
VAIDYANATHAN, KV
STREETMAN, BG
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
关键词
D O I
10.1063/1.324218
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:3342 / 3346
页数:5
相关论文
共 26 条
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    VAIDYANATHAN, KV
    STREETMAN, BG
    [J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 509 - 512
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