DETECTION OF AL AND MG CONTAMINATION IN SPUTTERED PT FILMS BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY

被引：5

作者：

ANDREWS, JM

MORABITO, JM

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[2] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

关键词：

D O I：

10.1016/0040-6090(76)90606-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：357 / 372

页数：16

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