VAPOUR PHASE DEPOSITION OF METALS AND THEIR COMPOUNDS - APPLICATIONS IN ELECTRONICS

被引：6

作者：

BUCK, RH

机构：

来源：

关键词：

D O I：

10.1016/0026-2714(67)90264-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：231 / &

共 65 条

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[36]

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[37]

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[39]

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