MODELING OF PYROLYTIC LASER-ASSISTED CHEMICAL VAPOR-DEPOSITION - MASS-TRANSFER AND KINETIC EFFECTS INFLUENCING THE SHAPE OF THE DEPOSIT

被引：43

作者：

SKOUBY, DC

JENSEN, KF

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.340490

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：198 / 206

页数：9

共 35 条

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