UHV TECHNIQUE FOR INTER-VACUUM SAMPLE TRANSFER

被引:13
作者
HOBSON, JP
KORNELSEN, EV
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
D O I
10.1116/1.570062
中图分类号
O59 [应用物理学];
学科分类号
摘要
An alternative to the modern UHV multiport surface analytic system is a transfer technique for intervacuum sample transfer which maintains the sample at UHV ( less than 10** minus **9 Torr) at all times. Major advantages are (1) economical use of available facilities by a number of experimentalists (2) instrument and surface standardization (3) complementary experiments by remote specialized laboratories (4) preparation of samples in specialized facilities (e. g. , space shuttle or thermonuclear reactor) followed by a transfer to surface analytic facility. Such a transfer system has been built and tested. Transfers currently take three to four hours between nearby stations. Intercontinental transfers are feasible using a battery operated ion pump during transport. For a transfer a UHV system must have a suitable gate valve (35-mm bore, 10** minus **1**3 ls** minus **1 helium closed conductance) and a platform capable of accepting a standard 22. 8-mm-diam ring, which carries the sample itself.
引用
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页码:701 / 707
页数:7
相关论文
共 13 条
[11]  
ROBINSON JE, 1978, PLASMA SURFACE INTER
[12]   VACUUM INTERLOCK SYSTEM FOR MOLECULAR-BEAM EPITAXY [J].
ROBINSON, JW ;
ILEGEMS, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (02) :205-207
[13]   VACUUM LOCK FACILITY FOR RAPID INSERTION OF SPECIMENS TO UHV [J].
STEWARD, VW ;
SYMS, CHA .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (01) :14-15