ALN FILMS FOR SAW SENSORS

被引：8

作者：

ODINTZOV, MA

SUSHENTZOV, NI

KUDRYAVTZEV, TL

机构：

[1] Mari Politechnical Inst, Yoshkar-Ola, Russia

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1991年 / 28卷 / 03期

关键词：

magnetron Sputtering - SAW Sensors;

D O I：

10.1016/0924-4247(91)85008-C

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The technology of obtaining thin AIN piezoelectric films on a glass substrate by means of a reactive r.f. magnetron sputtering method is considered. For obtaining polycrystalline oriented films with perfect crystallization, it is necessary to have certain technological conditions for their growth. The prospects of using these films in SAW sensors are discussed. An example is given of a SAW temperature sensor implemented on the basis of an AIN film on a glass substrate.

引用

页码：203 / 206

页数：4

共 6 条

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