THE STRUCTURE AND PROPERTIES OF ION-BEAM-SYNTHESIZED BORON-NITRIDE FILMS

被引：32

作者：

SAINTY, WG

MARTIN, PJ

NETTERFIELD, RP

MCKENZIE, DR

COCKAYNE, DJH

DWARTE, DM

机构：

[1] UNIV SYDNEY, SCH PHYS, SYDNEY, NSW 2006, AUSTRALIA

[2] UNIV SYDNEY, ELECTRON MICROSCOPE UNIT, SYDNEY, NSW 2006, AUSTRALIA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.341357

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3980 / 3986

页数：7

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