共 44 条
[31]
REGNARD JR, 1989, IN PRESS PROGR XRAY
[32]
SCHWENKER RO, 1971, J APPL PHYS, V42, P8
[33]
SEDGWICK TO, 1986, MRS S P, V52
[34]
RESIDUAL LATTICE DISORDER IN SELF-IMPLANTED SILICON AFTER PULSED LASER IRRADIATION
[J].
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,
1982, 70 (02)
:691-701
[35]
TAKAGI T, 1988, ION IMPLANTATION TEC
[37]
TSAI MY, 1975, J APPL PHYS, V51, P6
[40]
Watkins G.D., 1986, DEEP CTR SEMICONDUCT, P147