EFFECT OF THE OXYGEN-PRESSURE DURING SPUTTERING ON THE PROPERTIES OF THIN CUOX FILMS

被引：33

作者：

BEENSHMARCHWICKA, G

KROLSTEPNIEWSKA, L

SLABY, M

机构：

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90347-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：33 / 39

页数：7

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