HIGH-QUALITY AL2O3 THIN-FILMS PREPARED BY A NOVEL 2-STEP EVAPORATION PROCESS

被引：9

作者：

SARAIE, J

GOTO, S

KITAO, Y

YODOGAWA, Y

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期

关键词：

D O I：

10.1149/1.2100292

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2805 / 2809

页数：5

共 13 条

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[9] CHEMICAL VAPOR-DEPOSITION OF AL2O3 THIN-FILMS UNDER REDUCED PRESSURES [J].

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[10]

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