COLOR ELLIPSOSCOPE FOR REAL-TIME IMAGING OF NANOMETER-SCALE SURFACE PHENOMENA

被引：10

作者：

ADACHI, E

YOSHIMURA, H

NAGAYAMA, K

机构：

[1] Exploratory Research for Advanced Technology, Research Development Corporation of Japan, Tsukuba Research Consortium, Pilot Laboratory, Tsukuba, 300-26

来源：

APPLIED OPTICS | 1995年 / 34卷 / 04期

关键词：

COLOR; ELLIPSOMETRY; FILM; REAL TIME; IMAGING; NANOMETER;

D O I：

10.1364/AO.34.000729

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An imaging method was developed based on null ellipsometry with a white-light source. It is useful for visualizing the kinetics of fast surface phenomena on the nanometer scale.

引用

页码：729 / 731

页数：3

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