HOW TO REACH MORE PRECISE INTERPRETATION OF SUBGAP ABSORPTION-SPECTRA IN TERMS OF DEEP DEFECT DENSITY IN A-SI-H

Values for the deep defect density determined from PDS, CPM or ESR may vary significantly on the same sample depending on the method of data analysis used. Experimental conditions under which they yield comparable results are discussed. Procedures for determination of deep defect density from optical spectra are reviewed and compared on samples in light-saturated states. The measurement of the absorption coefficient at E = 1.2 eV, with a new range for the calibration factor, is suggested as an easy and generally usable procedure for the determination of deep defect density.