共 22 条
[2]
BRANEBERG CIJ, 1991, 1991 P MEMS NAR JAP, P221
[3]
PROPERTIES OF SILICON-ELECTROLYTE JUNCTIONS AND THEIR APPLICATION TO SILICON CHARACTERIZATION
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1991, 53 (01)
:8-19
[4]
SURFACE MICROMACHINING FOR MICROSENSORS AND MICROACTUATORS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:1809-1813
[6]
KLUMMP A, 1993, IN PRESS SENSORS ACT, P7
[7]
LANG W, 1994, TRANSDUCERS 93 YOKOH, V43, P185
[8]
LANG W, 1994, TRANSDUCERS 93 YOKOH, V43, P239
[9]
LANG W, 1990, SENSOR ACTUAT A-PHYS, V21, P473