SCANNING CAPACITANCE MICROSCOPY ON A 25 NM SCALE

被引：182

作者：

WILLIAMS, CC

HOUGH, WP

RISHTON, SA

机构：

来源：

关键词：

D O I：

10.1063/1.102096

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：203 / 205

页数：3

共 11 条

[1] NEAR-FIELD SCANNING OPTICAL MICROSCOPY (NSOM) - DEVELOPMENT AND BIOPHYSICAL APPLICATIONS
BETZIG, E
LEWIS, A
HAROOTUNIAN, A
ISAACSON, M
KRATSCHMER, E
[J]. BIOPHYSICAL JOURNAL, 1986, 49 (01) : 269 - 279
[2] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[3] 7X7 RECONSTRUCTION ON SI(111) RESOLVED IN REAL SPACE
BINNIG, G
ROHRER, H
GERBER, C
WEIBEL, E
[J]. PHYSICAL REVIEW LETTERS, 1983, 50 (02) : 120 - 123
[4] SCANNING CAPACITANCE MICROSCOPY
BUGG, CD
KING, PJ
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1988, 21 (02): : 147 - 151
[5] HIGH-RESOLUTION CAPACITANCE MEASUREMENT AND POTENTIOMETRY BY FORCE MICROSCOPY
MARTIN, Y
ABRAHAM, DW
WICKRAMASINGHE, HK
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (13) : 1103 - 1105
[6] MAGNETIC IMAGING BY FORCE MICROSCOPY WITH 1000-A RESOLUTION
MARTIN, Y
WICKRAMASINGHE, HK
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (20) : 1455 - 1457
[7] SCANNING CAPACITANCE MICROSCOPY
MATEY, JR
BLANC, J
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1437 - 1444
[8] PALMER RC, 1982, RCA REV, V43, P194
[9] PHOL DW, 1984, APPL PHYS LETT, V44, P651
[10] LITHOGRAPHY FOR ULTRASHORT CHANNEL SILICON FIELD-EFFECT TRANSISTOR-CIRCUITS
RISHTON, SA
SCHMID, H
KERN, DP
LUHN, HE
CHANG, THP
SAIHALASZ, GA
WORDEMAN, MR
GANIN, E
POLCARI, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 140 - 145