CHARACTERISTICS OF AL-AL2O3-SI STRUCTURES FORMED BY REACTIVE SUTTERING

被引：16

作者：

TANAKA, T

IWAUCHI, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1968年 / 7卷 / 11期

关键词：

D O I：

10.1143/JJAP.7.1420

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1420 / &

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